By John H. Lau ... [et al.]

Advent to MEMS --
Advanced MEMS packaging --
Enabling applied sciences for complicated MEMS packaging --
Advanced MEMS wafer-level packaging --
Optical MEMS packaging : communications --
Optical MEMS packaging : bubble change --
Optical MEMS : microbolometer packaging --
Bio-MEMS packaging --
Biosensor packaging --
Accelerometer packaging --
Radiofrequency MEMS switches --
RF MEMS tunable capacitors and tubable band-pass filters --
Advanced packaging of RF MEMS units

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Corvallis, OR), Craig, David M (Albany, OR), Watts, Gary J. (Albany, OR), “Die carrier with fluid chamber,” July 12, 2005. Huibers, Andrew G. (Mountain View, CA), Patel, Satyadev R. (Elk Grove, CA), “Spatial light modulators with light blocking/absorbing areas,” June 14, 2005. Ouellet, Luc (Granby, CA), Antaki, Robert (St-Luc, CA), Tremblay, Yves (Brigham, CA), “Fabrication of microstructures with vacuumsealed cavity,” June 7, 2005. Introduction to MEMS 6,900,072 6,894,383 6,876,056 6,858,466 6,853,067 6,846,725 6,844,959 6,844,623 6,838,047 6,835,594 Patel, Satyadev R.

US), US2007172991 (A1)—2007-07-26. 85. “Systems and methods of controlling micro-electromechanical devices,” Miles, Mark W. (US), US2007146376 (A1)—200706-28. 86. “Method for singulating a released microelectromechanical system wafer,” Loeppert, Peter V. (US), WO2007081346 (A1)— 2007-07-19. 87. “Micro-electro-mechanical systems (MEMS) device and system and method of producing the same,” Bar-Sadeh, Eyal (IL), Talalaevski, Alexander (IL) (+1), TW267490 (B)—2006-12-01. 88. “MEMS module package and packaging method,” Lee, Yeong Gyu (KR), KR20070042244 (A)—2007-04-23.

Ann Arbor, MI), Bernal, Luis P. (Ann Arbor, MI), Astle, Aaron A. (Ann Arbor, MI), Washabaugh, Peter D. (Ann Arbor, MI), “Micropump assembly for a microgas chromatograph and the like,” March 7, 2006. Chang-Chien, Patty P. L. (Hermosa Beach, CA), Wise, Kensall D. (Ann Arbor, MI), “Method and system for locally sealing a vacuum microcavity, methods and systems for monitoring and controlling pressure and method and system for trimming resonant frequency of a microstructure therein,” February 28, 2006.

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